NS 4.0 provides most intuitive and convenient UI(user interface) for operations of COXEM SEM. NS 4.0 was designed not only for experienced SEM users but also for the first-time users. The software Nano-station of COXEM can be used easily with a mouse and a keyboard, and it can reduce the inconvenience of users’ direct operations through the Auto Function feature. Moreover, the panorama shot function, by eliminating the hassle of users to directly control the camera, move and shoot for a long time, instead allows to automatically capture dozens or hundreds of shots of the desired portion of the image. It uses the dual display mode and allows the users to see the SE, BSE modes at a glance.