Technical Data:
| Plate size: | 320mm x 320mm |
| max. substrate height: | 100mm |
| max. solder temperature: | 450°C |
| Heat up / cool down: | max. 2.5 K/s |
| max. load: | 15 kg |
| Posible process gases: | N2 ; N2H2 95/5% ; H2 bis100% |
| Power supply: | 400V / 32A |
| Cooling water: | 10 slm |
| Weight: | ~ 300 kg |
Options:
| Formic acid gas line with bubbler |
| Maximum of 5 gas lines |
| Datalogging software |
| Integrated plasma equipment |
| High vacuum pump |

TRESKY T-6000 Integrated with Budatec VS320i

